Copper thin films by ion beam assisted deposition: Strong texture, superior thermal stability and enhanced hardness

Title
Copper thin films by ion beam assisted deposition: Strong texture, superior thermal stability and enhanced hardness
Authors
Keywords
Thin film, Ion beam processing, Defects, Microstructure, Hardness
Journal
ACTA MATERIALIA
Volume 98, Issue -, Pages 17-28
Publisher
Elsevier BV
Online
2015-07-12
DOI
10.1016/j.actamat.2015.07.013

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