Machining processes for sapphire wafers: a literature review

Published 2011 View Full Article

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Title
Machining processes for sapphire wafers: a literature review
Authors
Keywords
-
Journal
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE
Volume 225, Issue 7, Pages 975-989
Publisher
SAGE Publications
Online
2011-06-16
DOI
10.1177/2041297510393667

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