Silicon Crystal Growth and Wafer Technologies

Published 2012 View Full Article

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Title
Silicon Crystal Growth and Wafer Technologies
Authors
Keywords
-
Journal
PROCEEDINGS OF THE IEEE
Volume 100, Issue Special Centennial Issue, Pages 1454-1474
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-04-05
DOI
10.1109/jproc.2012.2189786

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