Micro-electrical discharge machining of micro-rods using tool electrodes with high electrical resistivity

In micro-electrical discharge machining (micro-EDM), the minimum machinable size is determined by the material removal per pulse discharge. In this study, two types of single-crystal silicon tool electrodes with high electrical resistivity were used to fabricate the micro-rod by minimizing the material removal per pulse discharge, and to reduce the machinable size for micro-EDM. The EDM characteristics of micro-rods using silicon tool electrodes with high electrical resistivity were investigated. Based on the experimental results, it is found that the peak discharge current decreases with an increase in the electrical resistivity of the tool electrode. Consequently, the average diameter of discharge craters generated on the micro-rods is reduced to approximately 0.4 mu m. The silicon tool electrode has also disadvantage of their higher tool wear ratio compared with that of copper, which is probably due to the brittleness of the silicon. Moreover, the material removal rate is significantly lower for the silicon tool electrodes compared with that for the copper tool electrode. Because the average diameter of the discharge craters generated by the silicon tool electrodes is small, an attempt is made in this study to fabricate a cemented tungsten carbide micro-rod with a diameter less than 1 pm using the silicon tool electrode with an electrical resistivity of 1.2 x 10(-3) Omega m. The result is indeed promising since the diameter of the micro-rod is 0.8 mu m, indicating that it is possible to fabricate micro-rods with a diameter within the submicrometer range by only using silicon tool electrode with high electrical resistivity in micro-EDM.