Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel

Published 2010 View Full Article

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Title
Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel
Authors
Keywords
-
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 35, Issue 1, Pages 173-182
Publisher
Elsevier BV
Online
2010-09-13
DOI
10.1016/j.precisioneng.2010.09.002

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