Design and characterization of a PZT driven micromachining tool based on single-point tool tip geometry

This paper presents the design and characterization of a piezoelectric tube scanner (PZT) driven micro-machining tool that is based on single-point tool tip geometries. The cutting module is made of a diamond stylus, which is known as the hardest material available. Therefore, this tool can be used to machine a wide range of materials ranging from polymers, through metals to glass. The microscopic cutting motion is achieved by using a piezo tube scanner as an actuator. The tool tip is attached to the free end of the PZT while the other end is firmly held stationary. By applying sinusoidal waveforms with different phase angles to the x and y electrodes of the PZT, the micro orbital motion of the diamond tip can be generated for machining purposes. This paper details the design of the tool and reports on its dynamic behavior in both short- and long-term experiments. (C) 2008 Elsevier Inc. All rights reserved.