Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 32, Issue 2, Pages 148-152Publisher
ELSEVIER SCIENCE INC
DOI: 10.1016/j.precisioneng.2007.07.002
Keywords
micromanipulation; microgripper; microsystems
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This paper reports the development of a semi-automatic microgripping system that consists of a microgripper and an x, y, z positioning system. The microgripper has two 1DOF fingers fabricated by an amorphous, soft magnetic material and is actuated electromagnetically. The microgripper is embedded in the 3DOF positioning system with the help of a stainless steel holder under an angle, which is manually adjusted, in respect to the working field. The position of the microgripper is observed optically and by three digital indicators(1) from Mitutoyo, which offer easy reading and continuous position tracking. All axes are actuated by step motors which allow precise positioning of the microparticles under manipulation. The microgripping system was tested in pick and place cases, under an optical microscope in atmospheric conditions. Optical fibres (125 mu m in diameter) and bonding wires (50 mu m in diameter) were handled. The temperature on the actuator, on the microgripper fingers and on the microgripper tips during manipulation was measured using K type (Ni/CrNi) thermocouples. The gripping force was evaluated as well. (C) 2007 Elsevier Inc. All rights reserved.
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