Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics

Published 2012 View Full Article

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Title
Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
Authors
Keywords
-
Journal
POLYMER
Volume 53, Issue 21, Pages 4834-4842
Publisher
Elsevier BV
Online
2012-08-28
DOI
10.1016/j.polymer.2012.08.050

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