The as-deposited structure of co-sputtered Cu–Ta alloys, studied by X-ray diffraction and molecular dynamics simulations

Authors

Keywords

Sputter deposition, Immiscible materials, Thin films, Molecular dynamics

Journal

Volume 82, Issue -, Pages 51-63

Publisher

Elsevier BV

Online

2014-10-04

DOI

10.1016/j.actamat.2014.08.066

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