Modulation of electron energy distributions and discharge parameters in a dual frequency ICP discharge

Title
Modulation of electron energy distributions and discharge parameters in a dual frequency ICP discharge
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 22, Issue 1, Pages 015022
Publisher
IOP Publishing
Online
2013-01-08
DOI
10.1088/0963-0252/22/1/015022

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