Synergetic effects in a discharge produced by a dual frequency–dual antenna large-area ICP source

Title
Synergetic effects in a discharge produced by a dual frequency–dual antenna large-area ICP source
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 21, Issue 3, Pages 035018
Publisher
IOP Publishing
Online
2012-05-29
DOI
10.1088/0963-0252/21/3/035018

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