Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 21, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/21/3/034002
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Space- and time-resolved measurements of Ar (P-3(2)) metastable atoms at the exit of an atmospheric pressure radio-frequency micro-plasma jet are performed using tunable diode laser absorption spectroscopy. The discharge features a coaxial geometry with a hollow capillary as the inner electrode and a ceramic tube with a metal ring as the outer electrode. Absorption profiles of metastable atoms and optical emission measurements reveal the dynamics and the filamentary structure of the discharge. Single filaments with a diameter of 125 mu m and metastable densities of about 10(13) cm(-3) are observed. The average spatial distribution of Ar metastables is characterized with and without a target in front of the jet, showing that the target potential and, therewith, the electric field distribution substantially change the filaments' expansion. Together with a detailed analysis of the ignition phase and the discharge's behavior under pulsed operation, the results give an insight into the excitation and de-excitation mechanisms.
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