Properties of a differentially pumped constricted hollow anode plasma source

Published 2011 View Full Article

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Title
Properties of a differentially pumped constricted hollow anode plasma source
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 1, Pages 015024
Publisher
IOP Publishing
Online
2011-01-25
DOI
10.1088/0963-0252/20/1/015024
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