Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas

Title
Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 5, Pages 055006
Publisher
IOP Publishing
Online
2011-08-17
DOI
10.1088/0963-0252/20/5/055006

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