Neutral depletion in an H−source operated at high RF power and low input gas flow

Title
Neutral depletion in an H−source operated at high RF power and low input gas flow
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 4, Pages 045005
Publisher
IOP Publishing
Online
2011-05-28
DOI
10.1088/0963-0252/20/4/045005

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