Modeling and experimental study of pulse modulated ICP discharge: production of Ar highly excited states

Title
Modeling and experimental study of pulse modulated ICP discharge: production of Ar highly excited states
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 3, Pages 035002
Publisher
IOP Publishing
Online
2011-04-12
DOI
10.1088/0963-0252/20/3/035002

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