Self-consistent simulation of very high frequency capacitively coupled plasmas

Authors

Keywords

Journal

Volume 17, Issue 3, Pages 035003

Publisher

IOP Publishing

Online

2008-05-24

DOI

10.1088/0963-0252/17/3/035003

Discuss science. Find collaborators. Network.

Join a conversation

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now