RF discharge under the influence of a transverse magnetic field

Published 2008 View Full Article

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Title
RF discharge under the influence of a transverse magnetic field
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 17, Issue 4, Pages 045005
Publisher
IOP Publishing
Online
2008-08-12
DOI
10.1088/0963-0252/17/4/045005

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