Influence of DC arc jets on flow fields analyzed by an integrated numerical model for a DC–RF hybrid plasma

Published 2008 View Full Article

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Title
Influence of DC arc jets on flow fields analyzed by an integrated numerical model for a DC–RF hybrid plasma
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 17, Issue 2, Pages 025011
Publisher
IOP Publishing
Online
2008-03-12
DOI
10.1088/0963-0252/17/2/025011

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