A Langmuir probe system incorporating the Boyd–Twiddy method for EEDF measurement applied to an inductively coupled plasma source

Title
A Langmuir probe system incorporating the Boyd–Twiddy method for EEDF measurement applied to an inductively coupled plasma source
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 18, Issue 1, Pages 014010
Publisher
IOP Publishing
Online
2008-11-15
DOI
10.1088/0963-0252/18/1/014010

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