The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics

Published 2014 View Full Article

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Title
The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics
Authors
Keywords
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Journal
PLASMA SCIENCE & TECHNOLOGY
Volume 16, Issue 7, Pages 669-676
Publisher
IOP Publishing
Online
2014-07-08
DOI
10.1088/1009-0630/16/7/07
References
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