Vibrational Temperature of Excited Nitrogen Molecules Detected in a 13.56 MHz Electrical Discharge by Sheath-Side Optical Emission Spectroscopy

Title
Vibrational Temperature of Excited Nitrogen Molecules Detected in a 13.56 MHz Electrical Discharge by Sheath-Side Optical Emission Spectroscopy
Authors
Keywords
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Journal
PLASMA SCIENCE & TECHNOLOGY
Volume 15, Issue 9, Pages 891-895
Publisher
IOP Publishing
Online
2013-09-17
DOI
10.1088/1009-0630/15/9/11

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