Journal
PLASMA PROCESSES AND POLYMERS
Volume 10, Issue 4, Pages 345-352Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.201200151
Keywords
dielectric barrier discharges (DBD); micropatterning; micro-plasma stamp; pattern transferring; self-assembled monolayers
Funding
- National Science Council of Taiwan [99-2221-E-006-013-MY3, 101-2321-B-006-012-]
- Top 100 Advancement Program [D101-33B03]
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A dielectric barrier discharge-based micro-plasma stamp is used to transfer a micro-scale pattern onto ultra-thin octadecanethiolate (ODT) self-assembled monolayers chemically adsorbed on Au (111). The results show that the specified pattern was transferred onto ODT/Au with a distortion rate of less than 1% and no significant changes in the imprint dimensions. The adsorbates formed during plasma treatment or exposure to air affected the transfer of patterns. The wet-etching rate for the washed and patterned ODT/Au surface increased 1.6-fold compared to that for the unwashed one. The boundary of the underlaying Au pattern with plasma exposure increased approximate to 3% due to lateral diffusion of the Au etching solution.
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