Plasma Polymerization of APTES to Elaborate Nitrogen Containing Organosilicon Thin Films: Influence of Process Parameters and Discussion About the Growing Mechanisms
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Title
Plasma Polymerization of APTES to Elaborate Nitrogen Containing Organosilicon Thin Films: Influence of Process Parameters and Discussion About the Growing Mechanisms
Authors
Keywords
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Journal
Plasma Processes and Polymers
Volume 10, Issue 3, Pages 250-261
Publisher
Wiley
Online
2012-12-22
DOI
10.1002/ppap.201200108
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