Nanopatterning of Plasma Polymer Thin Films by ArF Photolithography: Impact of Polymer Structure on Patterning Properties
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Title
Nanopatterning of Plasma Polymer Thin Films by ArF Photolithography: Impact of Polymer Structure on Patterning Properties
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 7, Issue 7, Pages 571-581
Publisher
Wiley
Online
2010-02-23
DOI
10.1002/ppap.200900162
References
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