Plasma-Polymerization of HMDSO Using an Atmospheric Pressure Dielectric Barrier Discharge

Title
Plasma-Polymerization of HMDSO Using an Atmospheric Pressure Dielectric Barrier Discharge
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S537-S542
Publisher
Wiley
Online
2009-03-17
DOI
10.1002/ppap.200931101

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