Anomalous Roughness Scaling of Well-Ordered Amorphous Fluorocarbon Films Deposited from an Octafluorocyclobutane Plasma

Title
Anomalous Roughness Scaling of Well-Ordered Amorphous Fluorocarbon Films Deposited from an Octafluorocyclobutane Plasma
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 5, Issue 7, Pages 653-660
Publisher
Wiley
Online
2008-06-16
DOI
10.1002/ppap.200800025

Ask authors/readers for more resources

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started