Anomalous Roughness Scaling of Well-Ordered Amorphous Fluorocarbon Films Deposited from an Octafluorocyclobutane Plasma

Published 2008 View Full Article

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Title
Anomalous Roughness Scaling of Well-Ordered Amorphous Fluorocarbon Films Deposited from an Octafluorocyclobutane Plasma
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 5, Issue 7, Pages 653-660
Publisher
Wiley
Online
2008-06-16
DOI
10.1002/ppap.200800025

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