Investigation of plasma characteristics in an unbalanced magnetron sputtering system

Title
Investigation of plasma characteristics in an unbalanced magnetron sputtering system
Authors
Keywords
-
Journal
PLASMA PHYSICS REPORTS
Volume 35, Issue 5, Pages 399-408
Publisher
Pleiades Publishing Ltd
Online
2009-05-25
DOI
10.1134/s1063780x09050055

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