Generation of a high-density highly non-equilibrium air plasma for high-speed large-area flat surface processing

Title
Generation of a high-density highly non-equilibrium air plasma for high-speed large-area flat surface processing
Authors
Keywords
-
Journal
PLASMA PHYSICS AND CONTROLLED FUSION
Volume 53, Issue 12, Pages 124031
Publisher
IOP Publishing
Online
2011-11-15
DOI
10.1088/0741-3335/53/12/124031

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