Optical emission spectroscopy for simultaneous measurement of plasma electron density and temperature in a low-pressure microwave induced plasma

Title
Optical emission spectroscopy for simultaneous measurement of plasma electron density and temperature in a low-pressure microwave induced plasma
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 16, Issue 10, Pages 103501
Publisher
AIP Publishing
Online
2009-10-06
DOI
10.1063/1.3240325

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