Journal
PHYSICS LETTERS A
Volume 377, Issue 3-4, Pages 297-302Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.physleta.2012.11.014
Keywords
Capacitively coupled plasma; Electron energy distribution function; Very high frequency; Surface wave plasma
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The influence of excitation frequency (13.56-96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage V-pp = 200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54-72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode. (C) 2012 Elsevier B.V. All rights reserved.
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