Journal
PHYSICAL REVIEW E
Volume 80, Issue 4, Pages -Publisher
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevE.80.041122
Keywords
Monte Carlo methods; partial differential equations; porosity; stochastic processes; surface roughness; thin films
Categories
Funding
- NSF [CBET0652131]
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The dependence of film surface roughness and porosity on lattice size in a porous thin film deposition process is studied via kinetic Monte Carlo simulations on a triangular lattice. For sufficiently large lattice size the steady-state value of the expected film porosity has a weak dependence on the lattice size and the steady-state value of the expected surface roughness square varies linearly with lattice size. An analysis of the film morphology based on a stochastic partial differential equation description of the film surface morphology supports and explains the findings of the numerical simulations.
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