Mechanism of nanostructure movement under an electron beam and its application in patterning

Published 2011 View Full Article

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Title
Mechanism of nanostructure movement under an electron beam and its application in patterning
Authors
Keywords
-
Journal
PHYSICAL REVIEW B
Volume 83, Issue 23, Pages -
Publisher
American Physical Society (APS)
Online
2011-07-01
DOI
10.1103/physrevb.83.235438
References
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