Benefits of the controlled reactive high-power impulse magnetron sputtering of stoichiometric ZrO2 films

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Title
Benefits of the controlled reactive high-power impulse magnetron sputtering of stoichiometric ZrO2 films
Authors
Keywords
Controlled reactive HiPIMS, Pulsed reactive gas flow, High deposition rates, Densified ZrO, 2, films, High optical transparency, Positive ions, O, ions
Journal
VACUUM
Volume 114, Issue -, Pages 131-141
Publisher
Elsevier BV
Online
2014-12-10
DOI
10.1016/j.vacuum.2014.12.004

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