From porous to dense thin ZnO films through reactive DC sputter deposition onto Si (100) substrates

Published 2012 View Full Article

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Title
From porous to dense thin ZnO films through reactive DC sputter deposition onto Si (100) substrates
Authors
Keywords
-
Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 209, Issue 12, Pages 2463-2469
Publisher
Wiley
Online
2012-08-31
DOI
10.1002/pssa.201228041
References
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