A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films

Published 2009 View Full Article

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Title
A combined X-ray, ellipsometry and atomic force microscopy study on thin parylene-C films
Authors
Keywords
-
Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 206, Issue 8, Pages 1727-1730
Publisher
Wiley
Online
2009-06-23
DOI
10.1002/pssa.200881616

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