Approximating the effect of the Casimir force on the instability of electrostatic nano-cantilevers

In this paper, the homotopy perturbation method (HPM) is used to investigate the effect of the Casimir force on the pull-in instability of electrostatic actuators at nano-scale separations. The proposed HPM is employed to solve nonlinear constitutive equations of cantilever beam-type nanoactuators. An analytical solution is obtained in terms of convergent series with easily computable components. Basic design parameters such as critical cantilever tip deflection and pull-in voltage of the nano-cantilevers are computed. As special cases of this work, freestanding nanoactuators and electrostatic micro-actuators are investigated. The analytical HPM results agree well with numerical solutions and those from the literature.