Investigation of the Si doping effect in β-Ga2O3 films by co-sputtering of gallium oxide and Si

Published 2011 View Full Article

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Title
Investigation of the Si doping effect in β-Ga2O3 films by co-sputtering of gallium oxide and Si
Authors
Keywords
-
Journal
PHYSICA B-CONDENSED MATTER
Volume 407, Issue 15, Pages 2900-2902
Publisher
Elsevier BV
Online
2011-08-29
DOI
10.1016/j.physb.2011.08.061

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