Aerosol assisted atmospheric pressure chemical vapor deposition of silicon thin films using liquid cyclic hydrosilanes

Published 2015 View Full Article

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Title
Aerosol assisted atmospheric pressure chemical vapor deposition of silicon thin films using liquid cyclic hydrosilanes
Authors
Keywords
Cyclopentasilane, Cyclohexasilane, Liquid silane, High-rate deposition, Aerosol Assisted chemical vapor deposition, Silicon
Journal
THIN SOLID FILMS
Volume 589, Issue -, Pages 465-471
Publisher
Elsevier BV
Online
2015-06-07
DOI
10.1016/j.tsf.2015.05.069

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