Nano-hardness estimation by means of Ar + ion etching

Title
Nano-hardness estimation by means of Ar + ion etching
Authors
Keywords
Nanoindentation, Hardness, Argon ion etching, Erosion rate, Thin films
Journal
THIN SOLID FILMS
Volume 589, Issue -, Pages 376-380
Publisher
Elsevier BV
Online
2015-05-22
DOI
10.1016/j.tsf.2015.05.023

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