High performance solution processed zirconium oxide gate dielectric appropriate for low temperature device application

Published 2015 View Full Article

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Title
High performance solution processed zirconium oxide gate dielectric appropriate for low temperature device application
Authors
Keywords
High-, k, inorganic dielectric, Solution processed dielectric and channel, High mobility
Journal
THIN SOLID FILMS
Volume 589, Issue -, Pages 90-94
Publisher
Elsevier BV
Online
2015-04-19
DOI
10.1016/j.tsf.2015.04.035

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