Characteristics of Al-doped ZnO films annealed at various temperatures for InGaZnO-based thin-film transistors

Published 2015 View Full Article

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Title
Characteristics of Al-doped ZnO films annealed at various temperatures for InGaZnO-based thin-film transistors
Authors
Keywords
Aluminum-doped ZnO (AZO), Annealing, Unbalance magnetron sputtering, Crystallinity, Resistivity, Thin film transistor
Journal
THIN SOLID FILMS
Volume 587, Issue -, Pages 94-99
Publisher
Elsevier BV
Online
2015-04-12
DOI
10.1016/j.tsf.2015.04.012

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