Characterization of boron-doped ZnO thin films prepared by magnetron sputtering with (100 − x )ZnO– x B 2 O 3 ceramic targets

Published 2015 View Full Article

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Title
Characterization of boron-doped ZnO thin films prepared by magnetron sputtering with (100 − x )ZnO– x B 2 O 3 ceramic targets
Authors
Keywords
Boron-doped zinc oxide, Ceramic target, Magnetron sputtering, Transparent conductive oxide
Journal
THIN SOLID FILMS
Volume 583, Issue -, Pages 205-211
Publisher
Elsevier BV
Online
2015-04-11
DOI
10.1016/j.tsf.2015.04.003

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