Characterization of fluorinated silica thin films with ultra-low refractive index deposited at low temperature

Published 2015 View Full Article

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Title
Characterization of fluorinated silica thin films with ultra-low refractive index deposited at low temperature
Authors
Keywords
Ultra-low refractive index, Fluorinated silica film, Moisture absorption, Nano-void, Ellipsometry
Journal
THIN SOLID FILMS
Volume 577, Issue -, Pages 67-73
Publisher
Elsevier BV
Online
2015-01-29
DOI
10.1016/j.tsf.2015.01.041

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