Low-temperature deposition of meta-stable β-MoO3(011) epitaxial thin films using step-and-terrace substrates

Published 2015 View Full Article

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Title
Low-temperature deposition of meta-stable β-MoO3(011) epitaxial thin films using step-and-terrace substrates
Authors
Keywords
Molybdenum oxides, Magnetron sputtering, Substrate, Epitaxial growth
Journal
THIN SOLID FILMS
Volume 595, Issue -, Pages 153-156
Publisher
Elsevier BV
Online
2015-10-31
DOI
10.1016/j.tsf.2015.10.066

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