The effect of substrate temperature on atomic layer deposited zinc tin oxide

Published 2015 View Full Article

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Title
The effect of substrate temperature on atomic layer deposited zinc tin oxide
Authors
Keywords
Zinc tin oxide (ZTO), Atomic layer deposition (ALD), Buffer layer, Mixed oxide, Thin film photovoltaics, Optical band gap
Journal
THIN SOLID FILMS
Volume 586, Issue -, Pages 82-87
Publisher
Elsevier BV
Online
2015-04-19
DOI
10.1016/j.tsf.2015.04.029

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