Doped zinc oxide films grown by hot-wire chemical vapour deposition

Published 2015 View Full Article

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Title
Doped zinc oxide films grown by hot-wire chemical vapour deposition
Authors
Keywords
Transparent conducting oxides, Thin films, Hot-wire CVD, Zinc oxide, In, Ga, and Al doping, Electrical properties, Optical properties, Annealing
Journal
THIN SOLID FILMS
Volume 576, Issue -, Pages 88-97
Publisher
Elsevier BV
Online
2015-01-16
DOI
10.1016/j.tsf.2015.01.010

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