Journal
THIN SOLID FILMS
Volume 592, Issue -, Pages 69-75Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2015.08.049
Keywords
Young's modulus; Strain; Phase change; GeSbTe; Cantilever resonance
Categories
Funding
- Netherlands Ministry of Economic Affairs [OND1320762]
- Netherlands Ministry of Education, Culture and Science
- EPSRC [EP/J00541X/2, EP/J018694/1]
- EPSRC [EP/J018694/1, EP/J00541X/2, EP/M015173/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/M015173/1, EP/J018694/1, EP/J00541X/2] Funding Source: researchfish
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The mechanical properties of phase change materials alter when the phase is transformed. In this paper, we report on experiments that determine the change in crucial parameters such as Young's modulus and residual stress for two of the most widely employed compositions of phase change films, Ge1Sb2Te4 and Ge2Sb2Te5, using an accurate microcantilever methodology. The results support understanding of the exact mechanisms that account for the phase transition, especially with regard to stress, which leads to drift in non-volatile data storage. Moreover, detailed information on the change in mechanical properties will enable the design of novel low-power nonvolatile MEMS. (C) 2015 Elsevier B.V. All rights reserved.
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