Journal
OPTICS LETTERS
Volume 39, Issue 17, Pages 5184-5187Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.39.005184
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Funding
- 973 grant of MOST [2013CB632705]
- NSFC [11322441, 11274331, 11334008]
- Fund of Shanghai Science and Technology Foundation [14JC1406400]
- Shanghai Rising-Star Program
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High temporal and spatial coherent simultaneous long-wavelength/mid-wavelength (LW/MW) two-color focal plane array (FPA) infrared detection is the cutting-edge technique for third-generation infrared remote sensing. In this Letter, HgCdTe LW/MW two-color infrared detectors were designed and fabricated. The top long-wavelength and bottom mid-wavelength infrared planar photodiodes were processed by selective B+-implantation after etching the long-wavelength epilayer into a curvature and exposing the mid-wavelength layers for the implantation of the n region of the MW photodiode by a micro-mesa array technique. A 128 x 128 MW/LW HgCdTe infrared FPA detector is fabricated photo-lithographically by simultaneous nonplanar B+-implantation of the LW and MW photodiodes, passivation and metallization of the sidewalls, mesa isolation, and flip-chip hybridization with a read-out integrated circuit. The inner mechanisms for suppressing the cross talk and improving photoresponse have been carried out by combining experimental work with numerical simulations. (C) 2014 Optical Society of America
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