Sub-100 nm structuring of indium-tin-oxide thin films by sub-15 femtosecond pulsed near-infrared laser light

Title
Sub-100 nm structuring of indium-tin-oxide thin films by sub-15 femtosecond pulsed near-infrared laser light
Authors
Keywords
-
Journal
OPTICS LETTERS
Volume 37, Issue 4, Pages 563
Publisher
The Optical Society
Online
2012-02-10
DOI
10.1364/ol.37.000563

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